In the April 2012 IEEE Instrumentation & Measurement Magazine F Khoshnoud and C W de Silva author an 11-page review on the technology and mechanical applications of MEMS Sensors.26 references are given.An excellent introduction to the subject.Professor de Siva is a leading world authority on the subject having authored 20 books and over 400 papers.
IEEE Instrumentation & Measurement Magazine,April 2012 ,pp 14-24.